Lobster200Z300S-T0X5-V Wafer Robot

Lobster series 200Z300S-T0X5-V wafer handling products is a single-armed wafer transfer robot with advanced wafer handling equipment. It is a vaccum model with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.



Features of Lobster200Z300S-T0X5-V Wafer Robot

Single-armed; payload is 0.5kg;



3-degrees-of-freedom;



Repositioning accuracy reaches ±0.1mm;



Cleanliness reaches ISO Class1.



For more information about wafer handling system, please feel free to contact us!



ROBOTPHOENIX, as an excellent robotics and automation companies, offers a wide range of automation robotics for you to choose from.